DW

Daniel Wack

KL Kla: 1 patents #57 of 230Top 25%
Overall (2024): #489,390 of 561,600Top 90%
1
Patents 2024

Issued Patents 2024

Patent #TitleCo-InventorsDate
11968772 Optical etendue matching methods for extreme ultraviolet metrology Zefram Marks, Larissa Juschkin 2024-04-23