Issued Patents 2024
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11968772 | Optical etendue matching methods for extreme ultraviolet metrology | Zefram Marks, Daniel Wack | 2024-04-23 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11968772 | Optical etendue matching methods for extreme ultraviolet metrology | Zefram Marks, Daniel Wack | 2024-04-23 |