ZM

Zefram Marks

KL Kla: 1 patents #57 of 230Top 25%
Overall (2024): #197,070 of 561,600Top 40%
1
Patents 2024

Issued Patents 2024

Patent #TitleCo-InventorsDate
11968772 Optical etendue matching methods for extreme ultraviolet metrology Larissa Juschkin, Daniel Wack 2024-04-23