Issued Patents 2024
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12181794 | Photolithography method | Xiangang Luo, Kaipeng Liu, Yunfei Luo, Shuai MOU, Ping Gao | 2024-12-31 |
| 12092960 | Mask topology optimization method and system for surface plasmon near-field photolithography | Xiangang Luo, Mingfeng Xu, Mingbo Pu, Di Sang, Xiaoliang Ma +2 more | 2024-09-17 |
| 12085741 | Method for preparing super-resolution lens based on metal-dielectric strip array, and using method of super-resolution lens | Xiangang Luo, Yunfei Luo, Kaipeng Liu, Yu Gu, Ping Gao | 2024-09-10 |
| 12078937 | Near-field lithography immersion system, immersion unit and interface module thereof | Xiangang Luo, Chengwei Zhao, Yanqin WANG, Changtao WANG, Yunfei Luo +2 more | 2024-09-03 |