Issued Patents 2024
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12092960 | Mask topology optimization method and system for surface plasmon near-field photolithography | Xiangang Luo, Mingfeng Xu, Di Sang, Xiaoliang Ma, Xiong Li +2 more | 2024-09-17 |
| 12078937 | Near-field lithography immersion system, immersion unit and interface module thereof | Xiangang Luo, Chengwei Zhao, Yanqin WANG, Changtao WANG, Zeyu Zhao +2 more | 2024-09-03 |
| 11868055 | Multifunctional lithography device | Xiangang Luo, Xiaoliang Ma, Ping Gao, Xiong Li | 2024-01-09 |