Issued Patents 2024
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12092960 | Mask topology optimization method and system for surface plasmon near-field photolithography | Xiangang Luo, Mingfeng Xu, Mingbo Pu, Xiaoliang Ma, Xiong Li +2 more | 2024-09-17 |