Issued Patents 2024
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12018369 | Substrate processing chamber and process gas flow deflector for use in the processing chamber | Olaf Fiedler, Thomas Huber, Christian Illemann, Mathias Male | 2024-06-25 |
| 11894445 | Method for producing a superjunction device | Daniel Tutuc, Ingo Muri, Hans Weber | 2024-02-06 |