Issued Patents 2024
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12018369 | Substrate processing chamber and process gas flow deflector for use in the processing chamber | Matthias Kuenle, Olaf Fiedler, Thomas Huber, Christian Illemann | 2024-06-25 |