Issued Patents 2024
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12064779 | Liquid-dispensing system, apparatus and method | Karl Pilch, Herbert Priess | 2024-08-20 |
| 12018369 | Substrate processing chamber and process gas flow deflector for use in the processing chamber | Matthias Kuenle, Olaf Fiedler, Thomas Huber, Mathias Male | 2024-06-25 |