Issued Patents 2024
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12106963 | Self aligned pattern formation post spacer etchback in tight pitch configurations | Sean D. Burns, Lawrence A. Clevenger, Matthew E. Colburn, Sivananda K. Kanakasabapathy, Christopher J. Penny +2 more | 2024-10-01 |
| 12019376 | Polymer brush adhesion promoter with UV cleavable linker | Jing Guo, Bharat Kumar, Ekmini Anuja De Silva, Jennifer Church, Dario L. Goldfarb | 2024-06-25 |
| 12021135 | Bottom source/drain etch with fin-cut-last-VTFET | Tao Li, Indira Seshadri, Eric R. Miller | 2024-06-25 |