Issued Patents 2024
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12135496 | Reflective mask blank and reflective mask | Yohei IKEBE, Takahiro Onoue, Hirofumi Kozakai | 2024-11-05 |
| 12111566 | Reflective mask blank, reflective mask and manufacturing method thereof, and semiconductor device manufacturing method | Yohei IKEBE | 2024-10-08 |
| 12105413 | Reflective mask blank, reflective mask, method of manufacturing reflective mask, and method of manufacturing semiconductor device | Yohei IKEBE | 2024-10-01 |
| 12072619 | Reflective mask blank, reflective mask, and method for manufacturing reflective mask and semiconductor device | Masanori Nakagawa | 2024-08-27 |
| 12025911 | Reflective structure, reflective mask blank, reflective mask and method of manufacturing semiconductor device | Kazuhiro Hamamoto | 2024-07-02 |
| 12019366 | Reflective mask blank, reflective mask, and method for manufacturing reflective mask and semiconductor device | Masanori Nakagawa | 2024-06-25 |
| 11880130 | Reflective mask blank, reflective mask and method of manufacturing semiconductor device | Yohei IKEBE, Takahiro Onoue, Hirofumi Kozakai | 2024-01-23 |