Issued Patents 2024
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12025911 | Reflective structure, reflective mask blank, reflective mask and method of manufacturing semiconductor device | Tsutomu Shoki | 2024-07-02 |
| 11899356 | Reflective film coated substrate, mask blank, reflective mask, and semiconductor device manufacturing method | Takashi Uchida | 2024-02-13 |