Issued Patents 2024
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12135496 | Reflective mask blank and reflective mask | Tsutomu Shoki, Takahiro Onoue, Hirofumi Kozakai | 2024-11-05 |
| 12111566 | Reflective mask blank, reflective mask and manufacturing method thereof, and semiconductor device manufacturing method | Tsutomu Shoki | 2024-10-08 |
| 12105413 | Reflective mask blank, reflective mask, method of manufacturing reflective mask, and method of manufacturing semiconductor device | Tsutomu Shoki | 2024-10-01 |
| 11914281 | Reflective mask blank, reflective mask, and method for manufacturing semiconductor device | — | 2024-02-27 |
| 11892768 | Reflective mask blank, reflective mask and method of manufacturing the same, and method of manufacturing semiconductor device | Mizuki KATAOKA | 2024-02-06 |
| 11880130 | Reflective mask blank, reflective mask and method of manufacturing semiconductor device | Tsutomu Shoki, Takahiro Onoue, Hirofumi Kozakai | 2024-01-23 |