Issued Patents 2024
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12181345 | Method of calibrating radiation thermometer and system thereof | Shuji Uozumi | 2024-12-31 |
| 12023777 | Temperature regulating apparatus and polishing apparatus | Keisuke Kamiki, Toru Maruyama | 2024-07-02 |
| 11958161 | Polishing apparatus having surface-property measuring device of polishing pad and polishing system | Keisuke Kamiki, Toru Maruyama | 2024-04-16 |
| 11897080 | Polishing apparatus | Masashi KABASAWA, Hisanori Matsuo, Keisuke Kamiki | 2024-02-13 |