SU

Shuji Uozumi

EB Ebara: 2 patents #34 of 168Top 25%
Overall (2024): #116,606 of 561,600Top 25%
2
Patents 2024

Issued Patents 2024

Showing 1–2 of 2 patents

Patent #TitleCo-InventorsDate
12181345 Method of calibrating radiation thermometer and system thereof Yasuyuki Motoshima 2024-12-31
11992915 System for adjusting pad surface temperature and polishing apparatus Toru Maruyama, Mitsunori Komatsu 2024-05-28