Issued Patents 2024
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11992915 | System for adjusting pad surface temperature and polishing apparatus | Shuji Uozumi, Toru Maruyama | 2024-05-28 |
| 11898940 | Leak detection system and inspection method for the system | Toru Maruyama, Keisuke Kamiki | 2024-02-13 |