Issued Patents 2024
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12023777 | Temperature regulating apparatus and polishing apparatus | Toru Maruyama, Yasuyuki Motoshima | 2024-07-02 |
| 11958161 | Polishing apparatus having surface-property measuring device of polishing pad and polishing system | Toru Maruyama, Yasuyuki Motoshima | 2024-04-16 |
| 11897080 | Polishing apparatus | Masashi KABASAWA, Yasuyuki Motoshima, Hisanori Matsuo | 2024-02-13 |
| 11898940 | Leak detection system and inspection method for the system | Toru Maruyama, Mitsunori Komatsu | 2024-02-13 |