Issued Patents 2024
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12080567 | Systems and methods for in-situ Marangoni cleaning | Shu Wang, Chui-Ya Peng | 2024-09-03 |
| 11994151 | Guiding grid | Wei-Ming Lai, Yi-Ta Lu | 2024-05-28 |
| 11927392 | Wafer drying system | Sheng-Wei Wu, Shu Wang | 2024-03-12 |
| 11923210 | Systems and methods for in-situ Marangoni cleaning | Shu Wang, Chui-Ya Peng | 2024-03-05 |