Issued Patents 2024
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12080567 | Systems and methods for in-situ Marangoni cleaning | Wei-Chun Hsu, Shu Wang | 2024-09-03 |
| 12068179 | Systems and methods for shuttered wafer cleaning | Tsui-Wei Wang, Yung-Li Tsai | 2024-08-20 |
| 11923210 | Systems and methods for in-situ Marangoni cleaning | Wei-Chun Hsu, Shu Wang | 2024-03-05 |