Issued Patents 2024
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12020964 | Contamination control in semiconductor manufacturing systems | Bo Chen Chen, Yung-Li Tsai | 2024-06-25 |
| 11958090 | Apparatus and method for wafer cleaning | Bo Chen Chen, Yung-Li Tsai | 2024-04-16 |
| 11927392 | Wafer drying system | Wei-Chun Hsu, Shu Wang | 2024-03-12 |