Issued Patents 2024
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12135211 | Device for measuring a substrate and method for correcting cyclic error components of an interferometer | Stephan Zschaeck, Uwe Horn, Thomas Kutzner | 2024-11-05 |
| 11880145 | Method for measuring a substrate for semiconductor lithography | Sven Martin | 2024-01-23 |