Issued Patents 2024
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12135211 | Device for measuring a substrate and method for correcting cyclic error components of an interferometer | Stephan Zschaeck, Uwe Horn, Oliver Jaeckel | 2024-11-05 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12135211 | Device for measuring a substrate and method for correcting cyclic error components of an interferometer | Stephan Zschaeck, Uwe Horn, Oliver Jaeckel | 2024-11-05 |