Issued Patents 2024
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12117731 | Method for producing a mirror of a microlithographic projection exposure apparatus | Christoph Zaczek, Erik Loopstra, Eric Eva, Drew Chieda, Matthew Lipson +1 more | 2024-10-15 |