Issued Patents 2024
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12001138 | Composition for forming silicon-containing resist underlayer film and patterning process | Takeru Watanabe, Yusuke Biyajima, Tsutomu Ogihara | 2024-06-04 |
| 11934100 | Composition for forming silicon-containing resist underlayer film and patterning process | Daisuke KORI, Kazunori Maeda | 2024-03-19 |