Issued Patents 2024
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12165903 | Chuck assembly, planarization process, apparatus and method of manufacturing an article | Se-Hyuk Im, Byung-Jin Choi | 2024-12-10 |
| 12138747 | Planarization process, apparatus and method of manufacturing an article | Byung-Jin Choi, Ozkan Ozturk, Masaki Saito | 2024-11-12 |
| 12027373 | Planarization process, planarization system, and method of manufacturing an article | Steven C. Shackleton, Xiaoming Lu, Byung-Jin Choi | 2024-07-02 |
| 11908711 | Planarization process, planarization system and method of manufacturing an article | Steven C. Shackleton, Masaki Saito | 2024-02-20 |