Issued Patents 2024
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12138747 | Planarization process, apparatus and method of manufacturing an article | Byung-Jin Choi, Ozkan Ozturk, Seth J. Bamesberger | 2024-11-12 |
| 11964421 | Method and system for loading a superstrate onto a superstrate chuck | Byung-Jin Choi | 2024-04-23 |
| 11908711 | Planarization process, planarization system and method of manufacturing an article | Steven C. Shackleton, Seth J. Bamesberger | 2024-02-20 |