Issued Patents 2024
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12165903 | Chuck assembly, planarization process, apparatus and method of manufacturing an article | Seth J. Bamesberger, Byung-Jin Choi | 2024-12-10 |
| 12153342 | Nanofabrication method with correction of distortion within an imprint system | Anshuman Cherala | 2024-11-26 |