Issued Patents 2024
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12116686 | Parameter adjustment model for semiconductor processing chambers | Eric J. Bergman, Adam Marc McClure, Paul R. McHugh, John L. Klocke | 2024-10-15 |
| 12104269 | Mechanically-driven oscillating flow agitation | Paul R. McHugh | 2024-10-01 |
| 12087571 | Methods, systems, and apparatus for tape-frame substrate cleaning and drying | Ying Wang, Guan Huei See | 2024-09-10 |
| 11982008 | Electroplating system | Paul R. McHugh, Kyle M. Hanson, John L. Klocke, Paul Van Valkenburg, Eric J. Bergman +5 more | 2024-05-14 |
| 11984358 | Systems and methods for improving within die co-planarity uniformity | Paul R. McHugh, Kwan Wook Roh | 2024-05-14 |