Issued Patents 2024
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12012653 | Cleaning assemblies for substrate processing chambers | Yuxing Zhang, Tuan Nguyen, Amit Kumar BANSAL, Nitin Pathak, Saket Rathi +3 more | 2024-06-18 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12012653 | Cleaning assemblies for substrate processing chambers | Yuxing Zhang, Tuan Nguyen, Amit Kumar BANSAL, Nitin Pathak, Saket Rathi +3 more | 2024-06-18 |