FC

Fuping Chen

A( Acm Research (Shanghai): 10 patents #2 of 25Top 8%
Overall (2024): #9,677 of 561,600Top 2%
10
Patents 2024

Issued Patents 2024

Showing 1–10 of 10 patents

Patent #TitleCo-InventorsDate
12111575 Coater with automatic cleaning function and coater automatic cleaning method Hui Wang, Wenjun Wang, Hongchao Yang, Voha Nuch, Fufa Chen +3 more 2024-10-08
12100586 Substrate cleaning method and apparatus Wenjun Wang, Ting YAO, Xiaoyan Zhang, Hui Wang 2024-09-24
12068149 Apparatus and method for cleaning semiconductor wafers Hui Wang, Zhiyou Fang, Jun Wu, Guanzhong Lu, Jian Wang +2 more 2024-08-20
12062556 Methods and apparatus for cleaning semiconductor wafers Xiaoyan Zhang, Hui Wang 2024-08-13
11967497 Methods and apparatus for cleaning semiconductor wafers Jun Wang, Hui Wang, Fufa Chen, Jian Wang, Xi Wang +5 more 2024-04-23
11955328 Method and apparatus for cleaning semiconductor wafer Hui Wang, Xi Wang 2024-04-09
11925881 Method and apparatus for cleaning substrates using high temperature chemicals and ultrasonic device Hui Wang, Xi Wang, Shena Jia, Danying Wang, Chaowei Jiang +2 more 2024-03-12
11911808 System for cleaning semiconductor wafers Hui Wang, Fufa Chen, Jian Wang, Xi Wang, Xiaoyan Zhang +5 more 2024-02-27
11911807 Method and apparatus for cleaning substrates Hui Wang, Xi Wang, Xiaoyan Zhang, Fufa Chen 2024-02-27
11876005 Methods and apparatus for cleaning flip chip assemblies Xiaoyan Zhang, Hui Wang 2024-01-16