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Guanzhong Lu

A( Acm Research (Shanghai): 1 patents #14 of 25Top 60%
Overall (2024): #454,313 of 561,600Top 85%
1
Patents 2024

Issued Patents 2024

Showing 1–1 of 1 patents

Patent #TitleCo-InventorsDate
12068149 Apparatus and method for cleaning semiconductor wafers Hui Wang, Zhiyou Fang, Jun Wu, Fuping Chen, Jian Wang +2 more 2024-08-20