Issued Patents 2024
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12111575 | Coater with automatic cleaning function and coater automatic cleaning method | Hui Wang, Fuping Chen, Wenjun Wang, Hongchao Yang, Voha Nuch +3 more | 2024-10-08 |
| 11967497 | Methods and apparatus for cleaning semiconductor wafers | Jun Wang, Hui Wang, Fuping Chen, Jian Wang, Xi Wang +5 more | 2024-04-23 |
| 11911807 | Method and apparatus for cleaning substrates | Hui Wang, Xi Wang, Fuping Chen, Xiaoyan Zhang | 2024-02-27 |
| 11911808 | System for cleaning semiconductor wafers | Hui Wang, Fuping Chen, Jian Wang, Xi Wang, Xiaoyan Zhang +5 more | 2024-02-27 |