Issued Patents 2023
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11817341 | Electrostatic chuck for use in semiconductor processing | — | 2023-11-14 |
| 11634817 | Substrate pedestal including backside gas-delivery tube | Nick Ray Linebarger, Jr. | 2023-04-25 |