Issued Patents 2023
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11851760 | PECVD deposition system for deposition on selective side of the substrate | Fayaz Shaikh, Curtis Bailey | 2023-12-26 |
| 11725283 | PECVD deposition system for deposition on selective side of the substrate | Fayaz Shaikh, Curtis Bailey | 2023-08-15 |
| 11634817 | Substrate pedestal including backside gas-delivery tube | Troy Alan Gomm | 2023-04-25 |