AM

Anu Mallikarjunan

VU Versum Materials Us: 1 patents #21 of 41Top 55%
Overall (2023): #518,749 of 537,848Top 100%
1
Patents 2023

Issued Patents 2023

Showing 1–1 of 1 patents

Patent #TitleCo-InventorsDate
11718767 Chemical mechanical planarization composition for polishing oxide materials and method of use thereof Ming-Shih Tsai, Chia-Chien Lee, Rung-Je Yang, Chris Keh-Yeuan Li, Hongjun Zhou +2 more 2023-08-08