Issued Patents 2023
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11728198 | Electrostatic chuck and wafer etching device including the same | Myoung Soo Park, Siqing Lu, Masashi Kikuchi | 2023-08-15 |
MI
Michio Ishikawa
Overall (2023): #325,458 of 537,848Top 65%
1
Patents 2023