Issued Patents 2023
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11728198 | Electrostatic chuck and wafer etching device including the same | Myoung Soo Park, Michio Ishikawa, Masashi Kikuchi | 2023-08-15 |
SL
Siqing Lu
Overall (2023): #250,902 of 537,848Top 50%
1
Patents 2023