Issued Patents 2023
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11557465 | Electrostatic chuck | Yutaka MOMIYAMA, Minoru Suzuki, Hitoshi Sasaki | 2023-01-17 |
| 11557467 | Electrostatic chuck | Yutaka MOMIYAMA, Minoru Suzuki, Hitoshi Sasaki | 2023-01-17 |