Issued Patents 2023
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11837471 | Methods of patterning small features | Katie Lutker-Lee, Jake Kaminsky, Angelique Raley, Mingmei Wang | 2023-12-05 |
| 11804380 | High-throughput dry etching of films containing silicon-oxygen components or silicon-nitrogen components by proton-mediated catalyst formation | Du Zhang, Mingmei Wang | 2023-10-31 |