Issued Patents 2023
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11776824 | Processing liquid ejection nozzle, nozzle arm, substrate processing apparatus, and substrate processing method | Kazuhiro Aiura, Tatsuhiro Ueki | 2023-10-03 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11776824 | Processing liquid ejection nozzle, nozzle arm, substrate processing apparatus, and substrate processing method | Kazuhiro Aiura, Tatsuhiro Ueki | 2023-10-03 |