Issued Patents 2023
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11776824 | Processing liquid ejection nozzle, nozzle arm, substrate processing apparatus, and substrate processing method | Yoshifumi Amano, Kazuhiro Aiura | 2023-10-03 |
| 11640911 | Substrate processing method of controlling discharge angle and discharge position of processing liquid supplied to peripheral portion of substrate | Jian Zhang | 2023-05-02 |