Issued Patents 2023
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11610766 | Target object processing method and plasma processing apparatus | Seiji Yokoyama, Taichi Okano, Sho OIKAWA, Shunichi Kawasaki | 2023-03-21 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11610766 | Target object processing method and plasma processing apparatus | Seiji Yokoyama, Taichi Okano, Sho OIKAWA, Shunichi Kawasaki | 2023-03-21 |