Issued Patents 2023
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11721595 | Processing method and plasma processing apparatus | Sho OIKAWA, Seiji Yokoyama, Taichi Okano | 2023-08-08 |
| 11610766 | Target object processing method and plasma processing apparatus | Seiji Yokoyama, Taichi Okano, Sho OIKAWA, Toshifumi Nagaiwa | 2023-03-21 |