TA

Tohru Azuma

TL Tokyo Electron Limited: 1 patents #287 of 865Top 35%
Overall (2023): #225,124 of 537,848Top 45%
1
Patents 2023

Issued Patents 2023

Showing 1–1 of 1 patents

Patent #TitleCo-InventorsDate
11752515 Coating apparatus and coating method Hideki Kajiwara, Yuya Yonemitsu, Shinichiro YAMANAKA, Shinichi MIZUSHINO, Naruaki Iida +1 more 2023-09-12