Issued Patents 2023
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11752515 | Coating apparatus and coating method | Hideki Kajiwara, Yuya Yonemitsu, Shinichiro YAMANAKA, Shinichi MIZUSHINO, Kohei Kawakami +1 more | 2023-09-12 |
| 11705359 | Substrate transfer mechanism and substrate transferring method | Kousei Ide | 2023-07-18 |