KK

Kohei Kawakami

TL Tokyo Electron Limited: 2 patents #121 of 865Top 15%
Overall (2023): #135,384 of 537,848Top 30%
2
Patents 2023

Issued Patents 2023

Showing 1–2 of 2 patents

Patent #TitleCo-InventorsDate
11752515 Coating apparatus and coating method Hideki Kajiwara, Yuya Yonemitsu, Shinichiro YAMANAKA, Shinichi MIZUSHINO, Naruaki Iida +1 more 2023-09-12
11561473 Liquid treatment apparatus and method of adjusting temperature of treatment liquid Takashi Yamauchi, Daiki Shibata 2023-01-24