Issued Patents 2023
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11810792 | Etching method and substrate processing apparatus | Masatsugu Makabe, Sho SAITOH | 2023-11-07 |
| 11688650 | Etching method and substrate processing apparatus | Gaku Shimoda, Masayuki Sawataishi | 2023-06-27 |