MM

Masatsugu Makabe

TL Tokyo Electron Limited: 1 patents #287 of 865Top 35%
📍 Rifu, JP: #106 of 296 inventorsTop 40%
Overall (2023): #339,062 of 537,848Top 65%
1
Patents 2023

Issued Patents 2023

Showing 1–1 of 1 patents

Patent #TitleCo-InventorsDate
11810792 Etching method and substrate processing apparatus Takanori Eto, Sho SAITOH 2023-11-07