Issued Patents 2023
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11753719 | Flow rate control method, flow rate control device, and film forming apparatus | Kennan Mo, Kouichi SEKIDO, Nagayasu Hiramatsu, Atsushi Matsumoto, Kensaku Narushima | 2023-09-12 |
| 11629404 | Method of forming tungsten film and controller | Kensaku Narushima, Nagayasu Hiramatsu, Atsushi Matsumoto | 2023-04-18 |