Issued Patents 2023
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11753719 | Flow rate control method, flow rate control device, and film forming apparatus | Kouichi SEKIDO, Takanobu HOTTA, Nagayasu Hiramatsu, Atsushi Matsumoto, Kensaku Narushima | 2023-09-12 |